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ETEL S.A. Products
ETEL S.A.
Positioning systems

ZT COMBINED MODULE

The ZT box is a module combining two degrees of freedom, in Z and Theta, within one single unit. Two actuations are possible along the Z direction, a coarse one and a fine one. This module can be used in a standalone mode or mounted on top of an XY platform. This module is especially well suited for wafer process control applications such as thin film metrology, critical dimensions, etc. Characteristics - Infinite rotation - Built-in vacuum supply at wafer chuck level - Built-in gravity compensator - ISO1 clean room compatible thanks to vacuum suction - Coarse Z axis with 12 mm stroke for wafer loading/unloading and fine Z with 4 mm stroke for focus adjustment - Version without a coarse Z can be done - Very good Z jitter as well as move and settle Main specifications - Bidirectional repeatability: ±0.3 µm for Z and ±2 arcsec for T - Position accuracy: ±0.6 µm for Z and ±3 arcsec for T - Speed up to: 0.1 m/s for Z and 15.7 rad/s for T - Acceleration up to: 0.2 g for Z and 104.7 rad/s² for T - Position stability: ±5 nm for Z and ±0.2 arcsec for T - Load capacity: 1 kg Ask for the corresponding Integration Manual for more information.
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TMB+ TORQUE MOTORS
TMB+ TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TMB+ TORQUE MOTORS
After decades of worldwide presence in the machine tool industry with leading edge Torque Motors, ETEL is presenting the new TMB+ motor. TMB+ is an evolution of the renowned TMB Torque Motor that provides a combination of increased performance and new features while maintaining the interfaces of existing motors. In fact, the torque density of TMB+ is increased by up to 20% while keeping the exact same footprint and reducing the power losses by up to 30%. Speed range is also significantly extended. TMB+ is enabling enhanced machine performance and allowing new process to be achieved into existing machines without any design change efforts. With its outstanding performance level, TMB+ will give access to direct drive technology to more applications while keeping quality and reliability at their highest level and reducing cost of ownership. All TMB+ variants are available with an optional cooling jacket. It consists of a precisely mounted metal jacket that ensures water tightness and guarantee exact same motor performance than with the conventional “open cooling” mounting. There are two different cooling jacket types to fit any machine design: radial or axial water inlet / outlet. Characteristics - More than 60 standard sizes available - Active length up to 200 mm - Four different windings per diameter - Open or closed cooling variants - Nickel coating on stator and rotor - Water cooling channels - 600 VDC bus voltage - Very high continuous torque density - High peak torque - Low torque ripple - Compatible with IMTHP module for accurate thermal control Main specifications - External diameter up to 1'290 mm - Large hollow shaft up to 1'070 mm - Peak torque up to 42'900 Nm - Speed up to 4'590 rpm Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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TMK TORQUE MOTORS
TMK TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TMK TORQUE MOTORS
The TMK torque motor range is a unique design redefining the working range of torque motors in the industry. The advanced electromagnetic design of TMK motors allows them to reach speed levels that were totally unsuspected for torque motors. The TMK maximum speed range can reach 8 times the speed of similar size conventional torque motors. In addition, the continuous and peak torque is larger than similar size torque motors. As such, TMK is a unique revolutionary design that drastically changes the definition of “high speed” in the torque motor world. Characteristics - 24 standard models available - More torque and more speed compared to classical torque motors - High motor robustness (fully encapsulated magnets) - Very high peak torque - TMK stator (up to Ø530 mm) compatible with the mechanical interface of the TMB series - Water cooling channels - 600 VDC bus voltage - Very high peak torque - Continuous torque increased by up to 30% vs TMB - Up to 8 times speed increase vs TMB - Field weakening compliant - Compatible with IMTHP module for accurate thermal control - Low torque ripple Main specifications - External diameter up to 1'050 mm - Large hollow shaft up to 800 mm - Peak torque up to 20'800 Nm - Speed up to 5'450 rpm Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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TML TORQUE MOTORS
TML TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TML TORQUE MOTORS
The TML torque motor is a low weight and low cost version of the famous TMB motor. This motor range is perfectly suited for applications that require the dynamic performance level of a direct drive torque motor while being less demanding in continuous torque. The TML is used in applications where water cooling is not requested. TML motors are designed with specific fixing lugs to be easily assembled into the final machine structure. Characteristics - 25 standard models available - Low cost - No water cooling option - 600 VDC bus voltage - Very high peak torque - Compatible with IMTHP module for accurate thermal control - Low torque ripple Main specifications - External diameters up to 581 mm - Large hollow shaft up to 420 mm - Peak torque up to 4'990 Nm - Speed up to 1'000 rpm Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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TMM TORQUE MOTORS
TMM TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TMM TORQUE MOTORS
The ETEL TMM torque motor is a low weight and low cost version of the famous TMB motor. This motor range is perfectly suited for applications that require the dynamic performance level of a direct drive torque motor while being less demanding in continuous torque. The TMM is used in applications where water cooling is not requested. TMM motors are designed to be glued directly in the final machine structure. Characteristics - 25 standard models available - Low cost - No water cooling option - 600 VDC bus voltage - Very high peak torque - Compatible with IMTHP module for accurate thermal control - Low torque ripple Main specifications - External diameters up to 530 mm - Large hollow shaft up to 420 mm - Peak torque up to 4'990 Nm - Speed up to 2'600 rpm Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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